JPH0648399Y2 - 非接触微小表面異常検出装置 - Google Patents

非接触微小表面異常検出装置

Info

Publication number
JPH0648399Y2
JPH0648399Y2 JP1987169451U JP16945187U JPH0648399Y2 JP H0648399 Y2 JPH0648399 Y2 JP H0648399Y2 JP 1987169451 U JP1987169451 U JP 1987169451U JP 16945187 U JP16945187 U JP 16945187U JP H0648399 Y2 JPH0648399 Y2 JP H0648399Y2
Authority
JP
Japan
Prior art keywords
laser beam
inspected
reflected
beams
abnormality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987169451U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0174547U (en]
Inventor
一夫 中村
司 対馬
英明 戸川
Original Assignee
旭光学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭光学工業株式会社 filed Critical 旭光学工業株式会社
Priority to JP1987169451U priority Critical patent/JPH0648399Y2/ja
Publication of JPH0174547U publication Critical patent/JPH0174547U/ja
Application granted granted Critical
Publication of JPH0648399Y2 publication Critical patent/JPH0648399Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1987169451U 1987-11-05 1987-11-05 非接触微小表面異常検出装置 Expired - Lifetime JPH0648399Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169451U JPH0648399Y2 (ja) 1987-11-05 1987-11-05 非接触微小表面異常検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169451U JPH0648399Y2 (ja) 1987-11-05 1987-11-05 非接触微小表面異常検出装置

Publications (2)

Publication Number Publication Date
JPH0174547U JPH0174547U (en]) 1989-05-19
JPH0648399Y2 true JPH0648399Y2 (ja) 1994-12-12

Family

ID=31459520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169451U Expired - Lifetime JPH0648399Y2 (ja) 1987-11-05 1987-11-05 非接触微小表面異常検出装置

Country Status (1)

Country Link
JP (1) JPH0648399Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4689491A (en) * 1985-04-19 1987-08-25 Datasonics Corp. Semiconductor wafer scanning system
JPS62238445A (ja) * 1986-04-10 1987-10-19 Hitachi Electronics Eng Co Ltd 表面検査装置

Also Published As

Publication number Publication date
JPH0174547U (en]) 1989-05-19

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